Janusz Bryzek 1978
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Title page

WARSAW UNIVERSITY OF TECHNOLOGY

FACULTY OF PRECISION MECHANICS INSTITUTE OF METROLOGY AND MEASURING INSTRUMENT DESIGN

mgr inż. [M.Sc. Eng.] Janusz BRYZEK

METHOD OF COMPENSATION OF THE EFFECT OF TEMPERATURE IN SEMICONDUCTOR PRESSURE TRANSDUCERS

Doctoral dissertation

SUPERVISOR Doc. dr inż. [Dr Eng., Associate Professor] Wojciech WŁODARSKI

WARSAW

19781

TABLE OF CONTENTS

page
1. Introduction 5
1.1. Introductory remarks 5
1.2. Aim and thesis of the work 6
2. The nature of temperature errors 9
3. Review of methods of compensating the effect of temperature using compensation circuitry in the analog part of the signal-conditioning circuit 18
3.1. Introduction 18
3.2. Method using the pressure sensor as a temperature sensor 18
3.3. Methods using discrete variable-resistance components to sense temperature 20
3.4. Methods using discrete junction semiconductor devices as temperature sensors 26
3.5. Methods using integrated resistive components as temperature sensors 30
3.6. Method using integrated semiconductor devices as temperature sensors 34
3.7. Summary 38
4. A new method of compensation of temperature errors 38
4.1. Introductory remarks 38
4.2. Sufficient conditions for the temperature compensation of the transfer characteristic of the transducer 39
4.3. The essence of complete temperature compensation 43
4.3.1. Synthesis of the method 43
4.3.2. Compensation procedure 48
4.3.3. Sufficient conditions for complete temperature compensation 52
4.4. The essence of incomplete temperature compensation 58
4.4.1. Case: s = 2, m = 1, n = 1 58
4.4.2. Case: s = 3, m = 1, n = 1 62
4.4.3. Case: s = 3, m = 1, n = 2 65
4.5. Summary 69
5. Practical realization of the method 72
5.1. Triple bridge 74
5.2. The problem of the interaction between the compensation of the lower and the upper range value 76
6. Application of the new compensation method in a piezoresistive pressure transducer 79
6.1. Introduction 79
6.2. Required metrological parameters of the transducer 79
6.3. Sensor 80
6.3.1. Construction 81
6.3.2. Sources of temperature errors 82
6.3.3. Selection of the parameters of the temperature compensation circuit 83
6.4. Electronic circuit of the transducer 88
6.4.1. Block diagram 88
6.4.2. Choice of the temperature-sensing elements 90
6.4.3. Optimization of the characteristics of the bridge compensating the zero drift 92
6.4.4. Optimization of the characteristics of the bridge compensating the span drift 96
6.5. Compensation procedure 100
6.6. Transducer tests 102
6.6.1. Measuring setup 102
6.6.2. Error analysis 103
6.6.3. Test results 104
7. Conclusions 108
8. Bibliography 111
9. Appendix 120
9.1. Description of the program optimizing the characteristics of the zero-drift compensation bridge 120
9.2. Description of the program optimizing the characteristics of the span-drift compensation bridge 1222

To my wife, Barbara, I dedicate this work

Translator's notes

  1. original reads "mgr inż." (magister inżynier) and "doc. dr inż." (docent, doktor inżynier); "Praca doktorska" = doctoral dissertation, "PROMOTOR PRACY" = supervisor of the dissertation. The title page prints "CISNIENIA" without the diacritic; the intended word is "CIŚNIENIA". ↩
  2. the contents page is headed "SPIS TRESCI" and item 6.3.2 reads "Zródła", as printed, for "SPIS TREŚCI" and "Źródła". Page numbers are those of the typescript, as printed. ↩